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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
FOREVER CO LTD	1-3-19 SAKAE-CHO KAWAGUCHI-SHI SAITAMA 332-0017

International Classification(s)

• 0703:TABLE KNIVES, FORKS AND SPOONS

• 2010 Application Filing Year
• 0703 Class
• 35 Applications Filed
• 35 Patents Issued To-Date
• 100 % Issued To-Date

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Hirai, Akira	Kawaguchi, JP	133	1382
# of filed Patents : 133 Total Citations : 1382

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Patent Citation Ranking

• 34 Citation Count
• 0703 Class

• 0 % this patent is cited more than
• 14 Age

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent No: 9869934

Collector in an extreme ultraviolet lithography system with optimal air curtain protection

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Abstract

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The present disclosure provides an extreme ultraviolet (EUV) lithography system. The EUV lithography system includes a collector having a coating surface designed to collect and reflect EUV radiation; a gas supply module; and a gas pipeline integrated with the collector and connected to the gas supply module. The gas pipeline includes inward and outward entrances into the collector. The inward and outward entrances are configured and operable to form a gas curtain on the coating surface of the collector.

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Description

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Claims

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