Heater for semiconductor manufacturing

United States of America Design

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Nov 17, 2009
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app pub date
Apr 27, 2006
filing date
Oct 27, 2005

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Patent Owner(s)

COORSTEK KK;TOKYO ELECTRON LIMITED;TOSHIBA CERAMICS CO., LTD.

International Classification(s)

1303:EQUIPMENT FOR DISTRIBUTION OR CONTROL OF ELECTRIC ....

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[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Honma, Hiroyuki	Tokyo , JP	103	1454
Inatomi, Yasuhiro	Tokyo , JP	1	1
Yamaga, Kenichi	Tokyo , JP	39	2721

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Heater for semiconductor manufacturing

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United States of America Design

29258749

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PATENT NO	D604257
SERIAL NO	29258749
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29258749

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Abstract

First Claim

Family

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