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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
HITACHI HIGH-TECH CORPORATION	17-1 TORANOMON 1-CHOME MINATO-KU TOKYO 105-6409

International Classification(s)

• 1303:EQUIPMENT FOR DISTRIBUTION OR CONTROL OF ELECTRIC ....

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• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Isozaki, Masakazu	Kudamatsu, JP	27	721
Makino, Akitaka	Hikari, JP	42	1252
Shichida, Hiroyuki	Kudamatsu, JP	18	855
Tsubone, Tsunehiko	Hikari, JP	115	2193
Uchino, Takeo	Kudamatsu, JP	17	595

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent No: D557226

Electrode cover for a plasma processing apparatus

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