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Country	kind	publication No.	Filing Date	Type	Sub-Type

• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

• BERKE, JOSEPH J.

International Classification(s)

• No Non-US Classification to display

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Berke, Joseph J	W. Bloomfield, MI	86	1645
# of filed Patents : 86 Total Citations : 1645
Grey, James W	Ortonville, MI	11	91
# of filed Patents : 11 Total Citations : 91

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 2005/0000,943

Processing apparatus, method for fabrication of semiconductor device by using the processing apparatus, and semiconductor device fabricated by this method

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Abstract

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The processing apparatus in accordance with the present invention comprises an object holding unit for holding a processing object, a tool holding unit for holding a tool for processing the processing object, and a relative movement mechanism for causing relative movement of the processing object held in the object holding unit and the tool held in the tool holding unit, while maintaining contact therebetween. The object holding unit and/or the tool holding unit are composed of a plurality of support plates of almost flat shape having elastic property which are arranged in a row.

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Description

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Claims

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