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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
MIDWEST TOOL AND CUTLERY COMPANY	1210 PROGRESS STREET P O BOX 160 STURGIS MI 49091

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Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Schmick, Daniel G	Sturgis, MI	2	19
# of filed Patents : 2 Total Citations : 19

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent No: 7934427

Capacitative pressure sensor

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Abstract

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A capacitative pressure sensor that has a silicon substrate, CMOS layers deposited on the silicon substrate, a conductive layer deposited on the CMOS layer and, a passivation layer on the conductive layer. A conductive membrane extends from the substrate assembly such that it is spaced from the conductive layer. The conductive layer has a plurality of apertures and the silicon substrate to define a passage for fluid communication with fluid pressure exterior to the pressure sensor and a cap extending from the substrate assembly to cover the membrane and form a chamber on one side of the conductive membrane that is sealed from the fluid pressure exterior to the pressure sensor.

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Description

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Claims

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Legal Events

 

• STCH2015
• FP2015
• LAPS2015
• REMI2014
• AS2012
• I2011
• P2010
• F2009
• AS2007
• PD2004

Date	Code	Event	Description
Jun 01, 2015	STCH	INFORMATION ON STATUS: PATENT DISCONTINUATION	free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362
May 03, 2015	FP	LAPSED DUE TO FAILURE TO PAY MAINTENANCE FEE	Effective Date: May 03, 2015
May 03, 2015	LAPS	LAPSE FOR FAILURE TO PAY MAINTENANCE FEES
Dec 12, 2014	REMI	MAINTENANCE FEE REMINDER MAILED
Aug 31, 2012	AS	ASSIGNMENT	free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:SILVERBROOK RESEARCH PTY LTD;REEL/FRAME:029243/0758 Owner name: PRECISION MECHATRONICS PTY LTD, AUSTRALIA Effective Date: Aug 31, 2012
May 03, 2011	I	Issuance
Apr 22, 2010	P	Published
Dec 20, 2009	F	Filing
Jul 12, 2007	AS	ASSIGNMENT	free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:SILVERBROOK, KIA;MALLINSON, SAMUEL GEORGE;REEL/FRAME:023680/0530 Owner name: SILVERBROOK RESEARCH PTY LTD,AUSTRALIA Effective Date: Jul 12, 2007 free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:SILVERBROOK, KIA;MALLINSON, SAMUEL GEORGE;REEL/FRAME:023680/0530 Owner name: SILVERBROOK RESEARCH PTY LTD, AUSTRALIA Effective Date: Jul 12, 2007
Oct 18, 2004	PD	Priority Date