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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
TOKYO ELECTRON LIMITED	3-1 AKASAKA 5-CHOME MINATO-KU TOKYO 1076325 ?1076325
TOKYO ELECTRON KYUSHU LIMITED	2655 TSUKURE KIKUYO-MACHI KIKUCHI-GUN KUMAMOTO-KEN

International Classification(s)

• Non-US Classification not provided for expired patents

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Akimoto, Masami	Kikuyo, JP	112	3903

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent No: D341418

Supply nozzle for applying liquid resist to a semiconductor wafer

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