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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
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Patent Owner(s)

Patent Owner	Address
TEL SAGAMI LIMITED A CORP OF JAPAN	3210-1 AZA-HONGO KAWASHIRI SHIROYAMA-MACHI TSUKUI-GUN KANAGAWA-KEN

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Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Ishii, Katsumi	Fujino, JP	71	1652
Katoh, Mitsuo	Sagamihara, JP	8	43
Watanabe, Shingo	Aikawa, JP	100	1391

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent No: D323332

Handling arm for boats for thermal treatment of semiconductor wafers

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