Method of manufacturing a mask

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United States of America Patent

PATENT NO 9999943
SERIAL NO

15091913

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Abstract

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A method of manufacturing a mask includes forming a first hole in a base material using a laser, the first hole penetrating through the base material from a first surface to a second surface different than the first surface, and expanding the first hole using an etchant to form a second hole.

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Patent Owner(s)

Patent OwnerAddress
SAMSUNG DISPLAY CO LTDSOUTH KOREA GYEONGGI DO YONGIN YONGIN GYEONGGI-DO

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chang, Soonchul Yongin-si, KR 11 33
Im, Sungsoon Yongin-si, KR 48 52
Moon, Minho Yongin-si, KR 30 49
Moon, Youngmin Yongin-si, KR 67 68

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