Integrated functional and fluidic circuits in Joule-Thompson microcoolers
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United States of America Patent
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Jun 19, 2018
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May 30, 2014
filing date -
May 30, 2014
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Abstract
An apparatus includes a first substrate of a first material having a first bonding surface, and one or more fluidic channels open at a plane of the first bonding surface. The apparatus also includes a different second material disposed on the first substrate. The second material connects two different portions of the one or more fluidic channels. An outer surface of the second material is at the plane of the first bonding surface at positions between the two portions. The apparatus also includes a second substrate having a second bonding surface in contact with the first bonding surface, the second substrate configured to confine fluid flow within the one or more fluidic channels. In a Joule-Thompson cryocooler apparatus, the first material is a first thermally insulating material and the second material is a thermally conductive material and the second substrate is made of a second thermally insulating material.
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