Cold trap

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United States of America Patent

PATENT NO 9999844
SERIAL NO

14556664

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Abstract

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A cold trap is provided between a vacuum chamber and a vacuum pump. The cold trap includes a cold panel and a cold panel chamber that surrounds the cold panel in an exhaust passage. The cold panel includes an expansion panel outside the cold panel chamber. The expansion panel is located in the vacuum chamber.

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Patent Owner(s)

Patent OwnerAddress
SUMITOMO HEAVY INDUSTRIES LTDTOKYO JAPAN TOKYO METROPOLIS

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Yatsu, Takahiro Tokyo, JP 10 10

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