Elastic wave device and fabrication method thereof
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United States of America Patent
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Jun 12, 2018
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N/A
app pub date -
Jun 8, 2016
filing date -
Dec 26, 2013
priority date (Note) -
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Abstract
An elastic wave device includes a dielectric film on a piezoelectric substrate, an IDT electrode including first and second comb electrodes on the dielectric film, first and second wiring electrodes electrically connected to the first and second comb electrodes, wherein the first comb electrode and the second comb electrode each include electrode fingers and a busbar in contact with the electrode fingers. An electrical conductivity of the piezoelectric substrate is higher than the electrical conductivity of the dielectric film. At least one of the first wiring electrode, the second wiring electrode, the busbar of the first comb electrode, and the busbar of the second comb electrode includes a portion that is in direct contact with the piezoelectric substrate.
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