Substrate holder mounting device and substrate holder container chamber
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jun 12, 2018
Issued Date -
N/A
app pub date -
Mar 23, 2011
filing date -
Sep 30, 2008
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A substrate holder mounting device is provided that is compact and has a simple structure. The substrate holder mounting device according to the present invention is provided with: a first and a second mounting mechanisms (5, 7) that are housed in a chamber and that are respectively configured to be capable of mounting a plurality of substrate holders along a row; row direction drive means that moves the first mounting mechanism to a row direction relatively with respect to the second mounting mechanism; a shifting mechanism (30) that shifts the substrate holders between the first and second mounting mechanisms; and a link-up mechanism that changes positions of the substrate holders in the row direction in the first or second mounting mechanism by a linkage between the shifting mechanism and the above-described row direction drive means.
First Claim
Other Claims data not available
Family
International Classification(s)
- 2011 Application Filing Year
- B05C Class
- 610 Applications Filed
- 322 Patents Issued To-Date
- 52.79 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- B05C Class
- 0 % this patent is cited more than
- 7 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Dec 12, 2025 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Dec 12, 2029 |
