Method for operating a pulsed arc source

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United States of America Patent

PATENT NO 9997338
SERIAL NO

11102337

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Abstract

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This invention relates to an arc-based method for the deposition of insulating layers and to an arc-based method for low-temperature coating processes, in which an electric arc discharge, ignited and applied on the surface of a target in an arc source, is simultaneously fed a direct current and a pulsed or alternating current.

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Patent Owner(s)

Patent OwnerAddress
OERLIKON SURFACE SOLUTIONS AG PFÄFFIKONSWISS HOLE PFAFFIKON ZURICH

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gstoehl, Oliver Balzers, LI 8 41
Lendi, Daniel Grabs, CH 8 107
Ramm, Jürgen Maienfeld, CH 28 70
Widrig, Beno Bad Ragaz, CH 38 178

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