Sub-pulsing during a state

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United States of America Patent

PATENT NO 9997333
SERIAL NO

15726235

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Abstract

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A method for achieving sub-pulsing during a state is described. The method includes receiving a clock signal from a clock source, the clock signal having two states and generating a pulsed signal from the clock signal. The pulsed signal has sub-states within one of the states. The sub-states alternate with respect to each other at a frequency greater than a frequency of the states. The method includes providing the pulsed signal to control power of a radio frequency (RF) signal that is generated by an RF generator. The power is controlled to be synchronous with the pulsed signal.

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Patent Owner(s)

Patent OwnerAddress
LAM RESEARCH CORPORATIONFREMONT CA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lyndaker, Bradford J San Ramon, US 52 884
Singh, Harmeet Fremont, US 164 5886
Valcore,, Jr John C Fremont, US 90 2067

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