Control apparatus and control method for spatial light modulator
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United States of America Patent
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Jun 12, 2018
Issued Date -
Dec 1, 2016
app pub date -
May 25, 2016
filing date -
May 27, 2015
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Abstract
A control apparatus includes a lens, an SLM presenting a modulation pattern on a modulation plane and outputting modulated light L2 for forming light spots P1 and P2 on a pupil plane of the lens, an imaging device imaging a fringe pattern image formed on a focal plane of the lens and generating image data Da indicating the fringe pattern image, a calculation unit calculating at least one kind of parameter among an intensity amplitude, a phase shift amount, and an intensity average from the image data Da, an analysis unit obtaining a deviation in relative positions of an optical axis of the lens and a reference coordinate of the modulation plane based on the parameter, and a changing unit changing an origin position of the reference coordinate so that the deviation in the relative positions is decreased.
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