Apparatus and method for manufacturing substrates
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United States of America Patent
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Jun 12, 2018
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N/A
app pub date -
Feb 4, 2016
filing date -
Apr 2, 2012
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Abstract
A substrate manufacturing apparatus includes a test apparatus including a test handler module for performing a test process on a substrate. The test handler module may include a conveyor unit to transfer a substrate, a handler unit for performing a test process on the substrate, and a transfer unit for transferring the substrate between the conveyor unit and the handler unit. The conveyor unit may include a feed conveyor and a discharge conveyor spaced apart from the feed conveyor.
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