Apparatus and method for evaluating semiconductor device
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United States of America Patent
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Jun 12, 2018
Issued Date -
May 18, 2017
app pub date -
Jul 7, 2016
filing date -
Nov 17, 2015
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Abstract
An apparatus for evaluating a semiconductor device includes: a chuck stage; an insulating substrate; a plurality of probes; a temperature adjustment unit; an evaluation/control unit; and a probe position/temperature inspection device including an inspection plate, a thermo-chromic material, a photographing unit, and an image processing unit. The photographing unit photographs a color-change image of the thermo-chromic material in a state in which distal end portions of the plurality of probes are pressed against the upper surface of the inspection plate. The image processing unit performs image processing to the color-change image to calculate in-plane positions and temperatures of the distal end portions of the plurality of probes.
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