Heater structure for a sensor device
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United States of America Patent
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Jun 12, 2018
Issued Date -
Jan 14, 2016
app pub date -
Jul 13, 2015
filing date -
Jul 14, 2014
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Abstract
The sensor device comprises a hotplate on a membrane. The hotplate is heated by a N-fold rotationally symmetric heater structure having N>1 heater elements of identical design. Each heater element comprises an inner section, an intermediate section and an outer section arranged in series, with the inner section having a larger electrical cross section than the outer section. This design allows to heat the hotplate to a homogeneous temperature at moderate supply voltages.
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