Six-degree-of-freedom displacement measurement method for exposure region on silicon wafer stage

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9995569
SERIAL NO

15568118

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A six-degree-of-freedom displacement measurement method for an exposure region on a wafer stage, the wafer stage comprises a coil array and a movable platform. A planar grating is fixed below a permanent magnet array of the movable platform. A reading head is fixed in a gap of the coil array. A measurement region is formed on the planar grating by an incident measurement light beam of the reading head. The reading head measures the six-degree-of-freedom displacement of the measurement region, so that the six-degree-of-freedom displacement of the exposure region is obtained through calculation. In the method, the six-degree-of-freedom displacement of the exposure region at any time is measured; the measurement complexity is reduced and the measurement precision is improved, and especially, the six-degree-of-freedom displacement of the exposure region can be precisely measured at any time even if the movable platform has high flexibility.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
TSINGHUA UNIVERSITY100084 NO 1 TSINGHUA YUAN BEIJING HAIDIAN DISTRICT BEIJING CITY BEIJING CITY 100084
BEIJING U-PRECISION TECH CO LTD100176 FLOOR 2 BUILDING 2 YARD 19 KECHUANG 10TH STREET BEIJING ECONOMIC AND TECHNOLOGICAL DEVELOPMENT ZONE DAXING DISTRICT BEIJING (YIZHUANG GROUP HIGH-END INDUSTRIAL AREA OF BEIJING PILOT FREE TRADE ZONE) BEIJING CITY BEIJING CITY 100176

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Anlin Beijing, CN 6 25
Cheng, Rong Beijing, CN 32 48
Hu, Chuxiong Beijing, CN 5 7
Hu, Jinchun Beijing, CN 28 50
Liu, Feng Beijing, CN 583 7601
Mu, Haihua Beijing, CN 17 35
Song, Yujing Beijing, CN 5 13
Xu, Dengfeng Beijing, CN 33 310
Yang, Kaiming Beijing, CN 31 58
Zhang, Ming Beijing, CN 891 7236
Zhi, Fan Beijing, CN 3 4
Zhu, Yu Beijing, CN 384 3919

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
7.5 Year Payment $3600.00 $1800.00 $900.00 Dec 12, 2025
11.5 Year Payment $7400.00 $3700.00 $1850.00 Dec 12, 2029
Fee Large entity fee small entity fee micro entity fee
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00