View port for observing ingot growth process and ingot growth apparatus including same
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United States of America Patent
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Jun 12, 2018
Issued Date -
Nov 3, 2016
app pub date -
Aug 1, 2014
filing date -
Dec 19, 2013
priority date (Note) -
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status (Latency Note)
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Abstract
A view port for observing ingot growth process of the present embodiment is as a view port for observing the inside of a chamber providing a space in which a growth process of an ingot is performed includes a body part disposed on the a side of the chamber and having a hole connected to the inside of the chamber; a window being inserted into the hole of the body part to maintain a sealing state of the chamber and through which light being transmitted from the inside of the chamber; and, a window purge being disposed on the side of the body part an forms air curtain.
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