Preliminary treatment method for workpiece
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United States of America Patent
Stats
-
Jun 12, 2018
Issued Date -
N/A
app pub date -
May 30, 2014
filing date -
May 31, 2013
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
Provided is a preliminary treatment method for a workpiece capable of shortening a cycle time by preventing a nodule from being formed on a carbon film. The preliminary treatment method for the workpiece is performed before a carbon film is formed on a surface of a workpiece W. A bias voltage is applied to the workpiece W disposed in a treatment space S maintained at a predetermined vacuum degree while an oxygen gas is supplied to the treatment space S before a material gas is supplied to the treatment space S, oxygen plasma is generated along the surface of the workpiece W, and oxygen, hydrogen, or water stuck to the surface of the workpiece W is removed.
First Claim
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International Classification(s)
- 2014 Application Filing Year
- C23C Class
- 2649 Applications Filed
- 2034 Patents Issued To-Date
- 76.79 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- C23C Class
- 0 % this patent is cited more than
- 7 Age
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