MEMS device and process
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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Jun 12, 2018
Issued Date -
N/A
app pub date -
Jun 30, 2014
filing date -
Jul 5, 2013
priority date (Note) -
In Force
status (Latency Note)
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Abstract
The application describes improvements to (MEMS) transducers (100) having a flexible membrane (301) with a membrane electrode (302), especially where the membrane is crystalline or polycrystalline and the membrane electrode is metal or a metal alloy. Such transducers may typically include a back-plate having at least one back-plate layer (304) coupled to a back-plate electrode (303), with a plurality of holes (314) in the back-plate electrode corresponding to a plurality back-plate holes (312) through the back-plate. In embodiments of the invention the membrane electrode has at least one opening (313) in the membrane electrode wherein, at least part of the area of the opening corresponds to the area of at least one back-plate hole, in a direction normal to the membrane, and there is no hole in the flexible membrane at said opening in the membrane electrode. There may be a plurality of such openings. The openings effectively allow a reduction in the amount of membrane electrode material, e.g. metal, that may undergo plastic deformation and permanently deform the membrane. The openings are at least partly aligned with the back-plate holes to minimize any loss of capacitance.
First Claim
Other Claims data not available
Family
| Country | kind | publication No. | Filing Date |
|---|---|---|---|
| GB | B | GB2515836 | Jul 05, 2013 |
| WO | A1 | WO2015001325 | Jun 30, 2014 |
| CN | B | CN105519137 | Jun 30, 2014 |
| TW | B | TWI622552 | Jul 04, 2014 |
| US | A1 | US20180044167 | Oct 24, 2017 |
International Classification(s)
- 2014 Application Filing Year
- H01L Class
- 23828 Applications Filed
- 21803 Patents Issued To-Date
- 91.51 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 4 Citation Count
- H01L Class
- 23.71 % this patent is cited more than
- 7 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Dec 12, 2025 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Dec 12, 2029 |
