Pressure sensor, manufacturing method of pressure sensor, altimeter, electronic apparatus, and moving object

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United States of America Patent

PATENT NO 9994439
SERIAL NO

15417674

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Importance

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Abstract

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A pressure sensor has a substrate having a diaphragm, a cavity portion that is positioned on one side of the diaphragm, and a ceiling portion that is disposed opposite to the diaphragm via the cavity portion, and unevenness is formed on a surface of the substrate facing the cavity portion. In addition, the unevenness has a plurality of recessed portions.

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Patent Owner(s)

Patent OwnerAddress
SEIKO EPSON CORPORATION1-6 SHINJUKU 4-CHOME SHINJUKU-KU TOKYO 160-8801

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kinugawa, Takuya Suwa, JP 12 16
Matsuzawa, Yusuke Chino, JP 25 43

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