Imprint template, detection method and detection device
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jun 12, 2018
Issued Date -
N/A
app pub date -
Jul 14, 2017
filing date -
Jul 25, 2016
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An imprint template includes a first region and a second region located in the periphery of the first region. The first region is provided with a first imprint structure configured to imprint a first film layer pattern into a base material in a product region of a target substrate. The second region is provided with a second imprint structure configured to imprint a second film layer pattern into the base material in the periphery of the product region of the target substrate. And the second film layer pattern is used for assessing imprint quality of the first film layer pattern.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully