MEMS component and method for the production thereof

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United States of America Patent

PATENT NO 9991822
SERIAL NO

14420871

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Abstract

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The invention proposes a MEMS component having a crystalline base body (GK), a recess (AN) and a structured assembly (A) which closes said recess, in which an opening (OG) is structured in a first functional layer (MN), the effective opening cross section thereof varying as a function of the pressure difference on the two sides of the first functional layer (MN).

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Patent Owner(s)

Patent OwnerAddress
TDK CORPORATION2-5-1 NIHONBASHI CHUO-KU TOKYO 103-6128

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Rombach, Pirmin Hermann Otto Kongens Lyngby, DK 32 371

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