Plating apparatus and plating method
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jun 5, 2018
Issued Date -
N/A
app pub date -
Jun 22, 2017
filing date -
Oct 21, 2010
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A plating apparatus allows a substrate holder to be serviced easily while ensuring easy access to the substrate holder and while a substrate is being processed in the plating apparatus. The plating apparatus includes a plating section for plating a substrate, a substrate holder for holding the substrate, a substrate holder transporter for holding and transporting the substrate holder, a stocker for storing the substrate holder, and a stocker setting section for storing the stocker therein. The stocker includes a moving mechanism for moving the stocker into and out of the stocker setting section.
First Claim
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International Classification(s)
- 2017 Application Filing Year
- C25D Class
- 678 Applications Filed
- 418 Patents Issued To-Date
- 61.66 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 1 Citation Count
- C25D Class
- 45.04 % this patent is cited more than
- 7 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Dec 5, 2025 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Dec 5, 2029 |
