Modular vertical furnace processing system
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United States of America Patent
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Jun 5, 2018
Issued Date -
Oct 22, 2015
app pub date -
Dec 3, 2013
filing date -
Dec 3, 2012
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Abstract
A vertical furnace processing system for processing semiconductor substrates, comprising the following modules: —a processing module including a vertical furnace; an I/O-station module including at least one load port to which a substrate cassette is dockable; a wafer handling module configured to transfer semiconductor substrates between the processing module and a substrate cassette docked to the load port of the I/O-station module; and a gas supply module including at least one gas supply or gas supply connection for providing the vertical furnace of the processing module with process gas, wherein at least two of the said modules are mutually decouplably coupled, such that said at least two modules are decouplable from one another to facilitate servicing of the system, and in particular the vertical furnace thereof.
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