Apparatus and method for correlating images of a photolithographic mask
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United States of America Patent
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Jun 5, 2018
Issued Date -
N/A
app pub date -
Dec 12, 2014
filing date -
Dec 13, 2013
priority date (Note) -
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status (Latency Note)
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Abstract
An apparatus for correlating at least two images of a photolithographic mask that at least partially overlap, in which the apparatus includes a correlation unit that is provided to use at least one random variation, which is present in the at least two images, of at least one structural element of the photolithographic mask for the correlation of the at least two images.
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International Classification(s)
- 2014 Application Filing Year
- H01J Class
- 2291 Applications Filed
- 1924 Patents Issued To-Date
- 83.99 % Issued To-Date
Cited Art Landscape
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- 0 Citation Count
- H01J Class
- 0 % this patent is cited more than
- 7 Age
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