Chemical supply unit capable of automatically replacing a canister and a substrate treatment apparatus having the same
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United States of America Patent
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Jun 5, 2018
Issued Date -
N/A
app pub date -
Jan 9, 2017
filing date -
Feb 18, 2016
priority date (Note) -
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status (Latency Note)
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Abstract
A substrate treatment apparatus includes a substrate treatment unit configured to provide a chemical solution to a substrate to treat the substrate, and a chemical supply unit configured to supply the chemical solution to the substrate treatment unit. The chemical supply unit includes a loader configured to load a canister containing the chemical solution to the chemical supply unit, a clamp configured to clamp the canister in place, a chemical supply line through which the chemical solution is supplied to the substrate treatment unit, and a coupler configured to couple the chemical supply line to the canister. The chemical supply unit is capable of automatically replacing the canister and the substrate.
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International Classification(s)
- H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....
- F17C:VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQU....
- B25J:MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION ....
- G03F:PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNE....
- B65D:CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR....
- B67D:DISPENSING, DELIVERING, OR TRANSFERRING LIQUIDS, N....
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