Debris protection system for reflective optic utilizing gas flow
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United States of America Patent
Stats
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Jun 5, 2018
Issued Date -
Oct 16, 2014
app pub date -
Apr 7, 2014
filing date -
Apr 10, 2013
priority date (Note) -
In Force
status (Latency Note)
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Abstract
The present disclosure is directed to a system for protecting a reflective optic and/or any other surface in a plasma-based illumination system from debris by actively flowing gas against the debris flow direction. According to various embodiments, a vacuum chamber is configured to contain a target material, wherein a laser or discharge produced plasma is generated in response to an excitation of the target material. One or more outlets within the chamber are configured to receive gas flowing from a fluidically coupled gas source and further configured to actively flow the gas towards a source of debris and away from the reflective optic or any other protected surface at a controlled flow rate.
First Claim
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International Classification(s)
- 2014 Application Filing Year
- G02B Class
- 7825 Applications Filed
- 6797 Patents Issued To-Date
- 86.87 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 3 Citation Count
- G02B Class
- 28.28 % this patent is cited more than
- 7 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Dec 5, 2025 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Dec 5, 2029 |
