Temporary mechanical stabilization of semiconductor cavities
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United States of America Patent
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Jun 5, 2018
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N/A
app pub date -
Sep 14, 2017
filing date -
Sep 23, 2016
priority date (Note) -
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Abstract
A method for fabricating an electronic device is disclosed. In one example, the method comprises providing a semiconductor wafer, forming a plurality of cavities into the semiconductor wafer, filling a stabilization material into the cavities, fabricating a temporary panel by applying a cap sheet onto the semiconductor wafer, the cap sheet covering the cavities, singulating the temporary panel into a plurality of semiconductor devices, fabricating an embedded wafer by embedding the semiconductor devices in an encapsulant, removing the cap sheet of each one of the semiconductor devices, and singulating the embedded wafer into a plurality of electronic devices.
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