Micromechanical device and method for manufacturing a micromechanical device
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United States of America Patent
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Jun 5, 2018
Issued Date -
Dec 19, 2013
app pub date -
Jun 13, 2013
filing date -
Jun 14, 2012
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Abstract
A micromechanical device, in particular a sensor device, and a method for manufacturing a micromechanical device are provided. The micromechanical device has a housing, the housing including a first cavity, and the housing including a second cavity that is separate from the first cavity. The micromechanical device is configured in such a way that a predetermined first gas pressure prevails in the first cavity, and a predetermined second gas pressure which is reduced compared to the first gas pressure prevails in the second cavity. A heating element is situated in the area of the second cavity. The micromechanical device has a printed conductor, the heating element being heatable with the aid of the printed conductor.
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