Composite transducer apparatus and system for processing a substrate and method of constructing the same
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United States of America Patent
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Jun 5, 2018
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Jun 1, 2015
filing date -
Jan 20, 2006
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Abstract
An apparatus for processing articles with acoustic energy and a method of constructing a transducer that utilizes a composite of piezoelectric pillars. In one embodiment, the invention is a method of constructing a device for generating acoustic energy comprising: providing a layer of supporting material; positioning a piezoelectric material atop the layer of adhesive material; cutting the piezoelectric material into a plurality of pillars so that spaces exist between adjacent pillars; and filling the spaces with a resilient material to form a composite assembly.
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