Temperature control apparatus including groove-routed optical fiber heating, substrate temperature control systems, electronic device processing systems, and processing methods
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United States of America Patent
Stats
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May 29, 2018
Issued Date -
N/A
app pub date -
Jun 12, 2015
filing date -
Jul 2, 2014
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
Substrate temperature control apparatus including groove-routed optical fibers. Substrate temperature control apparatus includes upper and lower members including grooves in one or both, and a plurality of optical fibers routed in the grooves. In one embodiment, the optical fibers are adapted to provide light-based pixelated heating. In another embodiment, embedded optical temperature sensors are adapted to provide temperature measurement. Substrate temperature control systems, electronic device processing systems, and methods including groove-routed optical fiber temperature control and measurement are described, as are numerous other aspects.
First Claim
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Family
International Classification(s)
- 2015 Application Filing Year
- F21V Class
- 3770 Applications Filed
- 2807 Patents Issued To-Date
- 74.46 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- F21V Class
- 0 % this patent is cited more than
- 7 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Nov 29, 2025 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Nov 29, 2029 |
