MEMS sensor
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United States of America Patent
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May 29, 2018
Issued Date -
N/A
app pub date -
Jan 26, 2017
filing date -
Oct 25, 2016
priority date (Note) -
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Abstract
A MEMS sensor is disclosed. The MEMS sensor includes a housing having an acoustic port, a base plate forming an accommodation cavity together with the housing, a MEMS chip accommodated in the accommodation cavity, and a control mechanism having a first working position and a second working position. At the first working position, the acoustic port communicates the accommodation cavity with an external space of the housing, while at the second working position, the control mechanism isolates the accommodation cavity from the external space of the housing.
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