Frequency compensated oscillator design for process tolerances
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United States of America Patent
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May 29, 2018
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N/A
app pub date -
Jun 2, 2015
filing date -
Oct 3, 2003
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Abstract
A continuous or distributed resonator geometry is defined such that the fabrication process used to form a spring mechanism also forms an effective mass of the resonator structure. Proportional design of the spring mechanism and/or mass element geometries in relation to the fabrication process allows for compensation of process-tolerance-induced fabrication variances. As a result, a resonator having increased frequency accuracy is achieved.
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