Multi-layered film and method of manufacturing the same

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United States of America Patent

PATENT NO 9985196
SERIAL NO

15319617

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Abstract

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A multi-layered film includes an electroconductive layer made of platinum (Pt), a seed layer including lanthanum (La), nickel (Ni), and oxygen (O), and a dielectric layer being preferentially oriented in a c-axis direction, which are at least sequentially disposed on a main surface of a substrate made of silicon.

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Patent Owner(s)

Patent OwnerAddress
ULVAC INC2500 HAGISONO CHIGASAKI-SHI KANAGAWA 253-8543

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Henmi, Mitsunori Chigasaki, JP 7 2
Hirose, Mitsutaka Chigasaki, JP 5 2
Kimura, Isao Chigasaki, JP 90 998
Kobayashi, Hiroki Chigasaki, JP 248 1354
Suu, Koukou Chigasaki, JP 55 882
Tsukagoshi, Kazuya Chigasaki, JP 5 34

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