Locally heated multi-zone substrate support
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
May 29, 2018
Issued Date -
N/A
app pub date -
Aug 14, 2017
filing date -
Aug 6, 2013
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
Embodiments of the present disclosure provide an electrostatic chuck (ESC) having azimuthal temperature control. In one embodiment, the electrostatic chuck includes an insulating base, an encapsulating member disposed on the insulating base, a first plurality of electrodes and a second plurality of electrodes disposed at a first elevation in the encapsulating member, the first plurality of electrodes intervening with the second plurality of electrodes, and a plurality of heating elements disposed at a second elevation in the encapsulating member, the heating elements being arranged in the form of discrete sections.
First Claim
Other Claims data not available
Family
International Classification(s)
- 2017 Application Filing Year
- H01L Class
- 30754 Applications Filed
- 25260 Patents Issued To-Date
- 82.14 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 3 Citation Count
- H01L Class
- 23.71 % this patent is cited more than
- 7 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Nov 29, 2025 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Nov 29, 2029 |
