Radiation collector, radiation source and lithographic apparatus
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United States of America Patent
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May 29, 2018
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N/A
app pub date -
Feb 26, 2014
filing date -
Mar 27, 2013
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Abstract
A radiation collector comprising a first collector segment comprising a plurality of grazing incidence reflector shells configured to direct radiation to converge in a first location at a distance from the radiation collector, a second collector segment comprising a plurality of grazing incidence reflector shells configured to direct radiation to converge in a second location at said distance from the radiation collector, wherein the first location and the second location are separated from one another.
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