Dual-phase interferometry for charge modulation mapping in ICS

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9983260
SERIAL NO

14433732

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A dual-phase interferometric method and device for charge modulation mapping in integrated circuits provides significant improvement in signal to noise ratio over conventional detection configurations. The method and device can be used for failure analysis and testing of advanced technology IC chips for which high sensitivity in modulation mapping is required.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
TRUSTEES OF BOSTON UNIVERSITYONE SILBER WAY BOSTON MA 02215

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Goldberg, Bennett B Newton, US 14 279
Ramsay, Euan Dublin, US 17 81
Unlu, Selim M Boston, US 5 50
Yurt, Abdulkadir Brighton, US 24 47

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
7.5 Year Payment $3600.00 $1800.00 $900.00 Nov 29, 2025
11.5 Year Payment $7400.00 $3700.00 $1850.00 Nov 29, 2029
Fee Large entity fee small entity fee micro entity fee
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00