Vaporization system
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
May 29, 2018
Issued Date -
N/A
app pub date -
Nov 25, 2015
filing date -
Dec 22, 2014
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The present invention makes it possible to reduce the size of a vaporization system by eliminating the need for conduits in the vaporization system, without it being necessary to form a flow path in order for a supply rate controller to be mounted inside a vaporizer, and is formed by a vaporizer that vaporizes a liquid material; a supply rate controller that controls a supply rate of the liquid material to the vaporizer; and a manifold block inside which an internal flow path is formed, and that has a device mounting surface on which both the vaporizer and the supply rate controller are mounted, wherein, as a result of the vaporizer and the supply rate controller being mounted on the device mounting surface, they are connected together via the flow path.
First Claim
Other Claims data not available
Family
International Classification(s)
- 2015 Application Filing Year
- F22B Class
- 204 Applications Filed
- 158 Patents Issued To-Date
- 77.46 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- F22B Class
- 0 % this patent is cited more than
- 7 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Nov 29, 2025 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Nov 29, 2029 |
