MEMS-microphone with reduced parasitic capacitance
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United States of America Patent
Stats
-
May 22, 2018
Issued Date -
N/A
app pub date -
Nov 14, 2011
filing date -
Nov 14, 2011
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A MEMS microphone with reduced parasitic capacitance is provided. A microphone includes a protection film covering a rim-sided area of the backplate.
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International Classification(s)
Cited Art Landscape
Patent Citation Ranking
- 2 Citation Count
- H04R Class
- 28.45 % this patent is cited more than
- 7 Age
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