Doped piezoelectric resonator
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United States of America Patent
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May 22, 2018
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app pub date -
Nov 20, 2015
filing date -
Jan 18, 2012
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Abstract
Mechanical resonators including doped piezoelectric active layers are described. The piezoelectric active layer(s) of the mechanical resonator may be doped with a dopant type and concentration suitable to increase the electromechanical coupling coefficient of the active layer. The increase in electromechanical coupling coefficient may all for improved performance and smaller size mechanical resonators than feasible without using the doping.
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