Nanoporous structures by reactive ion etching

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United States of America Patent

PATENT NO 9977002
SERIAL NO

14734018

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Abstract

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A metal structure including a first metal end region, a second metal end region, and an intermediate region between the first metal end region and the second metal end region, wherein the intermediate region comprises a metal nanostructure having a plurality of pores.

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Patent Owner(s)

Patent OwnerAddress
GLOBALFOUNDRIES U S INC400 STONEBREAK ROAD EXTENSION MALTA NY 12020

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Astier, Yann Irvington, US 74 664
Bai, Jingwei Los Angeles, US 42 252
Bruce, Robert L White Plains, US 74 327
Franklin, Aaron D Croton on Hudson, US 49 502
Smith, Joshua T Croton on Hudson, US 153 843

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