Ultrasonic device, method for manufacturing the same, probe, and electronic apparatus
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United States of America Patent
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May 22, 2018
Issued Date -
N/A
app pub date -
Jul 23, 2015
filing date -
Jul 31, 2014
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Abstract
An ultrasonic device that has high accuracy with respect to frequency and sensitivity and that can achieve a reduction of crosstalk is provided. A substrate of an ultrasonic device has a first surface and a second surface on a side opposite to the first surface, and has a first opening and a second opening that are separated from each other by a wall portion. A first vibration film and a second vibration film that close the first opening and the second opening, respectively, are disposed on the first surface of the substrate. A first piezoelectric element and a second piezoelectric element are provided on the first vibration film and the second vibration film, respectively. A recess that opens in the second surface of the substrate is demarcated in the wall portion.
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