Exhaust filter module, and a method and apparatus for efficiency testing the same
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United States of America Patent
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May 22, 2018
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N/A
app pub date -
Mar 21, 2006
filing date -
Mar 21, 2005
priority date (Note) -
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Abstract
A filter module configured for exhaust application, and a method and apparatus for testing the same are provided. In one embodiment, the filter module includes a downstream sampling port configured to allow a technician to sample flow, downstream of the filter module, from the cleanroom side of a filter module. In another embodiment, a shroud adapted to sealing engage a filter module under test is provided and includes a tube, disposed in the shroud, that couples a port to a downstream sampling port of the filter module.
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