Fluid transport apparatus, method for controlling the same, and chemical synthesis apparatus

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United States of America Patent

PATENT NO 9976581
SERIAL NO

15155362

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Abstract

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A fluid transport apparatus includes a pressure chamber to which a fluid is supplied, N drive elements that deliver the fluid to a channel by changing pressure of the fluid within the pressure chamber, and a control section that supplies a drive signal to each of the drive elements. The control section controls the N (N≥2) drive elements such that phases of drive signals which are supplied to each of the drive elements are different from each other. Therefore, by changing the pressure of the fluid within the pressure chamber while suppressing an amplitude of the drive elements as a whole, pulsation of the fluid is effectively suppressed.

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Patent Owner(s)

Patent OwnerAddress
SEIKO EPSON CORPORATION1-6 SHINJUKU 4-CHOME SHINJUKU-KU TOKYO 160-8801

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Sera, Hiroshi Chino, JP 14 49

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