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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES	PARIS FRANCE PARIS PARIS

International Classification(s)

• B81C:PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE M....
• B81B:MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-ME....

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• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Delaunay, Marc	Meylan, FR	15	276
Ghis, Anne	Saint Martin d'Heres, FR	11	81

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
7.5 Year Payment	$3600.00	$1800.00	$900.00	Nov 22, 2025
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Nov 22, 2029

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 7.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
May 22, 2018	US,9975755,B2   US9975755B2	GRANTED PATENT AS SECOND PUBLICATION
September 14, 2017	US,20170260041,A1   US20170260041A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 9975755

Membrane of amorphous carbon and MEMS including such a membrane

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