Force detecting device, robot, electronic component conveying apparatus
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United States of America Patent
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May 22, 2018
Issued Date -
N/A
app pub date -
Jun 23, 2017
filing date -
Nov 5, 2013
priority date (Note) -
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Abstract
A force detecting device includes a first base section, a second base section, and a charge output element arranged between the first base section and the second base section. The charge output element includes a first board formed by a Y-cut quartz plate and a second board formed by a Y-cut quartz plate. The boards are laminated in a direction orthogonal to the normal an attachment surface of the second base section. The force detecting device detects an external force on the basis of a first output corresponding to a shearing force in a first detection direction orthogonal to the laminating direction of the first board and a second output corresponding to a shearing force in a second detection direction orthogonal to the laminating direction of the second board and crossing the first detection direction.
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