CMUT assembly with acoustic window
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United States of America Patent
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May 22, 2018
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N/A
app pub date -
May 8, 2017
filing date -
May 9, 2012
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Abstract
In some examples, a capacitive micromachined ultrasonic transducer (CMUT) apparatus includes one or more CMUTs formed on a CMUT substrate to have an operational direction facing away from the CMUT substrate. A first layer of a first material is disposed over the one or more CMUTs for passing acoustic energy to or from the one or more CMUTs in the operational direction. The first layer may be a solid, liquid, gel, or colloid. Further, a second layer of a second material may be disposed over the first layer and may be a different material from the first material. In some cases, the second layer may be a solid with an inner surface having a curvature facing the first layer. Additionally, or alternatively, in some cases, the acoustic impedance of the first material and the second material may be between 1 and 2 MRayl.
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